SECS/GEM
DOCUMENTATION
FOR EQ U I PM E N T:
GPD GL O BAL M AX/ D S DI SP E NS E R S
MANU FAC T UR E D BY:
GPD GL O BAL , INC.
REVI S I O N
1.2.0
REL E A S E D ON:
JANUA RY 31, 202 0
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2025
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SECS/GEM
DOCUMENTATION
FO R EQUI PM EN T:
GPD GLO BA L MAX/DS DISP E NS ER S
MA NU FACTURE D BY:
GPD GLO BA L, INC.
REV ISIO N
RE L EAS E D ON:
JA NUARY 31, 2020
TABLE OF CONTENTS
GPD Global, Inc. SECS/GEM Documentation 2019-10-
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1 INTRODUCTION
1.1 Purpose
This document describes the GEM compliant SECS-II interface for the mentioned equipment. It includes the information required by the SECS-II and GEM standards including the GEM Compliance Statement, GEM State Models, SECS-II Message Documentation, and other interface details.
1.2 Manufacturer
GPD Global, Inc. USA
611 Hollingsworth Street Grand Junction, CO 81505-1017 USA Toll-free for USA & Canada: +1.800.PICKGPD (+1.800.742.5473) Tel: +1.970.245. Fax: +1.970.245. www.gpd-global.com
GPD Global, Inc. Asia
Bayan Lepas, Penang, 11900 Malaysia Tel: +60.12.555. sclim@gpd-global.com www.gpd-global.com
1.3 Equipment
GPD MAX Dispensers GPD DS Dispensers
1.4 Changes From Previous Version
1.4.1 Changes From 1.1.
Updated screenshots and verbiage §8.8.2.5 SECS/GEM Connection Status o Reflecting changes to OnlineLocal/OnlineRemote controls Clarified operation of PP-SELECT remote command §8. Updated screenshots and verbiage §8.8.1 FLOware GUI o Reflecting changes to OnlineLocal/OnlineRemote and Spool Controls Added Equipment Constants 10004,10005 – see §8. Changed Sections §8.2 - §8.7 to landscape orientation for improved readability Added Section §9 documenting additions/changes related to Option 22271055
1.5 References
Standard Name Acronym
SEMI E30 Generic Model for Communication and Control of SEMI Equipment GEM
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SEMI E5 SEMI Equipment Communications Standard 2 Message Content SECS-II
SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer SECS-I
SEMI E37 High Speed Message Service-Single Session HSMS-SS
For more information about SEMI or the standards produced by SEMI, contact SEMI by one of the
following references.
http://www.semi.org/
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message, or when either a transaction timer or a conversation timer expires.
Data Variable
Information directly related to a collection event. The value is only guaranteed to be valid when included in a report linked to a valid collection event. A list of valid collection events is included in the data variable's description in this manual.
Equipment Constant A machine setting. The host or local operator may set the value.
Event Report One or more reports linked to a collection event. The data in the report is sent in thesame SECS-II message as the collection event notification.
Generic Equipment Model
This is used as a reference model for any type of equipment. It contains functionality that can apply to most equipment, but does not address unique requirements of specific equipment.
GEM
Generic Model for Communications and Control of SEMI Equipment. SEMI E30. A standard implementation of the SECS-II standard defining a common set of equipment behavior and communications capabilities.
Harel Notation
The use of state charts that show traditional state-transition diagrams with several additional concepts such as hierarchy and concurrent. See the Harel Notation heading in section 1.7.3 for more information.
HSMS
High Speed Message Service. SEMI E37. This standard defines TCP/IP based communication as an alternative to SECS-I (serial) communication. There are two modes of this standard, HSMS-SS (single session) and HSMS-GS (general session).
Host The SEMI E4 and E5 standards define Host as "the intelligent system thatcommunicates with the equipment."
Message Fault A message fault occurs when the equipment receives a message that it cannot processbecause of a defect in the message.
Operator
A human who operates the equipment in order to perform its intended function (e.g. processing). The operator typically interacts with the equipment via the equipment supplied operator console.
Processing Cycle A processing cycle is a sequence wherein all of the material contained in a typical process unit is processed. This is often used as a measure of action or time.
Recipe A file of equipment processing instructions. The instructions tell the equipment what to do and how to do it. Recipes are also called process programs.
Report List of status variables, data variables, and equipment constants. An ID number identifies it uniquely.
Scenario A scenario is a group of SECS-II messages arranged in a sequence to perform a capability. Other information may also be included in a scenario for clarity.
SECS-I SEMI Equipment Communications Standard 1; SEMI E4.
This standard specifies a method for a message transfer protocol with electrical signal levels based upon EIA RS232-C.
SECS-II SEMI Equipment Communications Standard 2; SEMI E5.
This standard specifies a group of messages and the respective syntax and semantics
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for those messages relating to semiconductor manufacturing equipment control.
SECS-II message The host and equipment communicate by sending each other SECS-II messages. A stream number, function number, and message body describe a SECS-II message.
SEMI Semiconductor Equipment and Materials International. See www.semi.org for more information.
State Model A State Model is a collection of states and state transitions that combine to describe the behavior of a system. This model includes a definition of the conditions that delineate a state, the actions/reactions possible within a state, the events that trigger transitions to other states, and the process of transitioning between states.
Status Variable Information about the status of the machine. The value is always valid.
System Default Refers to state(s) in the equipment behavioral model that are expected to be active at the end of system initialization. It also refers to the value(s) that specified equipment variables are expected to contain at the end of system initialization.
System Initialization The process that equipment performs at power-up, system activation, and/or system reset. This process is expected to prepare the equipment to operate properly and according to the equipment behavioral models.
Trace List of status variables polled and sent to the host at a defined frequency. An ID number identifies it uniquely.
Unit Unit identifier defined in the SECS-II standard.
Variable Type One of the types defined by the SECS-II standard.
1.6.3 Harel Notation
In GEM, proper state machine Harel Notation requires a state diagram, state definitions, and a transition table.
1.6.3.1 State-Transition Diagrams
Harel's statecharts extend traditional state-transition diagrams with several additional concepts, most important of which are hierarchy and concurrence. Statecharts depict the behavior of a system by showing possible states, events that prompt a change of state, and the composition of states. The symbols are then listed and explained. See the figure below for the basic notational symbols.
H* S C
a) State b) T ransition c) Default Entry Point
d) History e) Selector f) Conditional Selector
Rounded boxes represent states. A state transition is shown graphically with a line from the old state terminating with the arrow symbol at the new state. Transitions are unidirectional -- while the reverse
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The switch is in the on position. Power is available to the motor. Speed of the motor will change in proportion to the speed knob adjustment.
1.6.3.3 Transition Table
The last piece of the state model is the transition table. It consists of several columns that list the transition number from the diagram, the starting and ending state for the transition, and three columns titled trigger, action, and comment. The trigger column describes the combination of events and conditions that initiates the transition (e.g. Sx, Fy message received). The trigger should be related to a single clearly defined event at the equipment. The action column identifies the activities associated directly with the transition. These activities may be of three types: a) actions taken upon exit of the old state, b) actions taken upon entry to the new state, and c) actions not associated with either state. These are not differentiated in this document. The final column allows for additional comments that help to clarify the transition. Table A.5, an example of a transition table, illustrates the motor example in Figure A.5.2 (shown in the SEMI E30 manual).
Table A.5. Transition Table for Motor Example
# Current State Trigger New State Action Comment
1 OFF Switch turned to on position
ON Power supplied to motor.
Power supply assumed available. Motor begins to turn.
2 ON Switch turned to off position.
OFF Power supply to motor disconnected.
Motor begins deceleration.
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2 GEM COMPLIANCE STATEMENT
Fundamental GEM Requirements Implemented GEM Compliant
State Models Yes
Yes
Equipment Processing States Yes
Host-Initiated S1, F13/14 Scenario Yes
Event Notification Yes
On-line Identification Yes
Error Messages Yes
Documentation Yes
Control (Operator) Initiated Yes
Additional Capabilities Implemented GEM Compliant
Establish Communications Yes Yes
Dynamic Event Report Configuration Yes Yes
Data Variable and Collection Event Namelist Requests Yes Yes
Variable Data Collection Yes Yes
Trace Data Collection Yes Yes
Status Data Collection Yes Yes
Alarm Management Yes Yes
Remote Control Yes Yes
Equipment Constants Yes Yes
Process Program Management Yes Yes
Material Movement No No
Equipment Terminal Services Yes Yes
Clock Yes Yes
Limits Monitoring No No
Spooling Yes Yes
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3 STATE MODELS
The following sections contain state models for semiconductor manufacturing equipment. These state models describe the behavior of the equipment from a host. GEM requires each state model to be documented with a state diagram, a transition table and a definition of each system behavior when that state is active. Multiple host equipment must have the same documented models for each host.
3.1 Communications
3.1.1 General Description
The Communications State Model defines the behavior of the equipment in relation to the existence or absence of a communications link with the host. Two major states of SECS communication protocols are DISABLED and ENABLED. The ENABLED state has two sub-states, NOT COMMUNICATING and COMMUNICATING.
3.1.2 Communications State Diagram
WAIT CR FROM HOST WAIT DELAY
WAIT CRA
ENABLED
10
5
COMMUNICATING
HOST-INITIATED CONNECT EQUIPMENT-INITIATED CONNECT
NOT COMMUNICATING
15
(^149)
8 7
DISABLED 2 3
c
1
4
6
COMMUNICATIONS
3.1.3 State Definitions
3.1.3.1 DISABLED
The equipment does not desire SECS-II communication with a host computer. If the operator switches from ENABLED to DISABLED, all SECS-II communications will cease immediately. Any unsent messages are discarded. All further actions on any open transactions and conversations are terminated. Refer to SEMI E for definitions of SECS-II transaction and conversation protocols. The DISABLED State may be the system default.
3.1.3.2 ENABLED
The equipment desires SECS-II communication with a host computer. ENABLED has two sub-states, COMMUNICATING and NOT COMMUNICATING. Whenever communications are enabled, either during system initialization or through operator selection, the sub-state of NOT COMMUNICATING is active until communications are formally established. Lower-level protocols (such as SECS-I or HSMS-SS)
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are assumed to be functioning normally in that they are capable of supporting the communication of SECS- II syntax. The ENABLED State may be the system default.
3.1.3.3 NOT COMMUNICATING
Only messages S1, F13, S1, F14, and Stream 9 are sent while this sub-state is active. The equipment discards any messages received from the host other than S1, F13 or S1, F14. The equipment will periodically attempt to establish communication with the host computer by issuing an S1, F13 until communications are successfully established. Only one equipment-initiated S1, F13 transaction is open at any time.
The NOT COMMUNICATING state has two sub-states, HOST-INITIATED CONNECT and EQUIPMENT-INITIATED CONNECT. Both are active whenever the equipment is NOT COMMUNICATING. These sub-states clarify the behavior of the equipment in the event that both the equipment and the host attempt to establish communications during the same period of time. Note that in the Harel notation, an exit from any sub-state is an exit from the parent state and thus from all other sub- states of that parent sub-state.
3.1.3.4 EQUIPMENT-INITIATED CONNECT
This state has two sub-states, WAIT CRA and WAIT DELAY. Upon any entry to the NOT COMMUNICATING State, whenever EQUIPMENT-INITIATED CONNECT first becomes active, a transition to WAIT CRA occurs. The CommDelay timer is then set to "expired," and an immediate attempt to send S1, F13 is made.
3.1.3.5 WAIT CRA
An establish-communications request has been sent. The equipment waits for the host to acknowledge the request.
3.1.3.6 WAIT DELAY
A connection-transaction failure has occurred. The CommDelay timer has been initialized. The equipment waits for the timer to expire.
3.1.3.7 HOST-INITIATED CONNECT
This state describes the behavior of the equipment in response to a host-initiated S1, F13 while NOT COMMUNICATING is active.
3.1.3.8 WAIT CR FROM HOST
This is a sub state of HOST-INITIATED CONNECT. The equipment waits for an S1, F13 from the host. If an S1, F13 is received, the equipment attempts to send an S1, F14 with COMMACK = 0.
3.1.3.9 COMMUNICATING
Communications have been established between the equipment and host. The equipment may receive any message from the host, including S1, F13. When the equipment is COMMUNICATING, SECS communications with a host computer must be maintained. This state remains active until communications are disabled or a communication failure occurs. If the equipment receives S1, F13 from the host while in the COMMUNICATING sub-state, it should respond with S1, F14 with COMMACK set to zero. If the equipment receives S1, F14 from a previously sent S1, F13, no action is required.
In case of communication failure, the equipment returns to the NOT COMMUNICATING sub-state and attempts to re-establish communications with the host.
It is possible that the equipment will be waiting for an S1, F14 from the host in EQUIPMENT-INITIATED CONNECT/WAIT CRA when an S1, F13 is received from the host in HOST-INITIATED CONNECT/WAIT CR FROM HOST. When this situation occurs, both equipment and host have an open S1, F13/S1, F14 transaction. Since communications are successfully established on the favorable completion of any S1, F13/S1, F14 transaction, either of these two transactions may be the first to complete successfully and to cause the transition from NOT COMMUNICATING to COMMUNICATING. In this