ECE 510 Spring 2008
Design Problems
• Design a plausible process flow to fabricate the
structure represented in the next view graph
• Follow the ideas of Silicon fabrication process flow.
• You do not have to include any quantitative process
parameters ( times, temperatures,doses etc).
• Your answer should be given in terms of a series of
sketches of the structure after each major process
step.
• Briefly explain your reasoning for each step and the
order in which the process was selected
