Docsity
Docsity

Prepare for your exams
Prepare for your exams

Study with the several resources on Docsity


Earn points to download
Earn points to download

Earn points by helping other students or get them with a premium plan


Guidelines and tips
Guidelines and tips

Design A Plausible Process Flow to Fabricate the Structure | ECE 510, Study notes of Electrical and Electronics Engineering

Material Type: Notes; Class: TOP: FOURIER OPTICS; Subject: Elect and Computer Engineering; University: Portland State University; Term: Spring 2008;

Typology: Study notes

Pre 2010

Uploaded on 08/19/2009

koofers-user-gzf-1
koofers-user-gzf-1 🇺🇸

10 documents

1 / 7

Toggle sidebar

This page cannot be seen from the preview

Don't miss anything!

bg1
ECE 510 Spring 2008
Design Problems
Design a plausible process flow to fabricate the
structure represented in the next view graph
Follow the ideas of Silicon fabrication process flow.
You do not have to include any quantitative process
parameters ( times, temperatures,doses etc).
Your answer should be given in terms of a series of
sketches of the structure after each major process
step.
Briefly explain your reasoning for each step and the
order in which the process was selected
pf3
pf4
pf5

Partial preview of the text

Download Design A Plausible Process Flow to Fabricate the Structure | ECE 510 and more Study notes Electrical and Electronics Engineering in PDF only on Docsity!

ECE 510

Design Problems

•^

Design a plausible process flow to fabricate thestructure represented in the next view graph

-^

Follow the ideas of Silicon fabrication process flow.

-^

You do not have to include any quantitative processparameters ( times, temperatures,doses etc).

-^

Your answer should be given in terms of a series ofsketches of the structure after each major processstep.

-^

Briefly explain your reasoning for each step and theorder in which the process was selected

C