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Material Type: Notes; Class: TOP: FOURIER OPTICS; Subject: Elect and Computer Engineering; University: Portland State University; Term: Spring 2008;
Typology: Study notes
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ECE 510
Design a plausible process flow to fabricate thestructure represented in the next view graph
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Follow the ideas of Silicon fabrication process flow.
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You do not have to include any quantitative processparameters ( times, temperatures,doses etc).
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Your answer should be given in terms of a series ofsketches of the structure after each major processstep.
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Briefly explain your reasoning for each step and theorder in which the process was selected
C